Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910165 | Ruthenium layer formation for copper film deposition | Seshadri Ganguli, Kavita Shah, Mei Chang | 2011-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910165 | Ruthenium layer formation for copper film deposition | Seshadri Ganguli, Kavita Shah, Mei Chang | 2011-03-22 |