Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501078 | Ion extraction assembly | Geoffrey Ryding, Theodore H. Smick, Takao Sakase | 2002-12-31 |
| 6437351 | Method and apparatus for controlling a workpiece in a vacuum chamber | Theodore H. Smick, Geoffrey Ryding | 2002-08-20 |
| 6331713 | Movable ion source assembly | Theodore H. Smick, Geoffrey Ryding, Shu Satoh, Peter Rose | 2001-12-18 |
| 6297510 | Ion implant dose control | — | 2001-10-02 |
| 6274875 | Fluid bearing vacuum seal assembly | Theodore H. Smick, Takao Sakase, Geoffrey Ryding | 2001-08-14 |
| 6271529 | Ion implantation with charge neutralization | Vadim G. Dudnikov, Mehran Nasser-Ghodsi | 2001-08-07 |
| 6271530 | Apparatus for reducing distortion in fluid bearing surfaces | Theodore H. Smick, Takao Sakase, Geoffrey Ryding | 2001-08-07 |
| 6268609 | Apparatus and method for reducing heating of a workpiece in ion implantation | Geoffrey Ryding, Theodore H. Smick | 2001-07-31 |
| 6248642 | SIMOX using controlled water vapor for oxygen implants | Robert P. Dolan, Bernhard F. Cordts, III, Geoffrey Ryding | 2001-06-19 |
| 6163033 | Method and apparatus for controlling a workpiece in a vacuum chamber | Theodore H. Smick, Geoffrey Ryding | 2000-12-19 |
| 5898179 | Method and apparatus for controlling a workpiece in a vacuum chamber | Theodore H. Smick, Geoffrey Ryding | 1999-04-27 |
| 4804837 | Ion implantation surface charge control method and apparatus | — | 1989-02-14 |
| 4804852 | Treating work pieces with electro-magnetically scanned ion beams | Peter Rose, Lee Grodzins | 1989-02-14 |
| 4675530 | Charge density detector for beam implantation | Peter Rose | 1987-06-23 |
| 4587433 | Dose control apparatus | — | 1986-05-06 |
| 4539217 | Dose control method | — | 1985-09-03 |