Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5953630 | Suppression of tungsten film deposition on a semiconductor wafer bevel edge with a halogenide purge gas | Yuji Maeda, Manabu Yamazaki, Naomi Yoshida, Keiichi Tanaka | 1999-09-14 |