Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7268076 | Apparatus and method for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece | Karl M. Brown, Vineet Haresh Mehta | 2007-09-11 |
| 7244344 | Physical vapor deposition plasma reactor with VHF source power applied through the workpiece | Karl M. Brown, Vineet Haresh Mehta, Ralf Hofmann, Wei Wang, Semyon Sherstinsky | 2007-07-17 |
| 7214619 | Method for forming a barrier layer in an integrated circuit in a plasma with source and bias power frequencies applied through the workpiece | Karl M. Brown, Vineet Haresh Mehta | 2007-05-08 |