Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5397596 | Method of reducing particulate contaminants in a chemical-vapor-deposition system | — | 1995-03-14 |
| 5322567 | Particulate reduction baffle with wafer catcher for chemical-vapor-deposition apparatus | Paul Deaton, Norma Riley | 1994-06-21 |
| 5188672 | Reduction of particulate contaminants in chemical-vapor-deposition apparatus | — | 1993-02-23 |