Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119173 | Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier | Timo ADLER, Clemens PIHAN | 2024-10-15 |
| 11508595 | Apparatus and method for contactless transportation of a device in a vacuum processing system | Jörg Schuler | 2022-11-22 |
| 11377310 | Magnetic levitation system, base of a magnetic levitation system, vacuum system, and method of contactlessly holding and moving a carrier in a vacuum chamber | Thorsten Meiss | 2022-07-05 |