Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508595 | Apparatus and method for contactless transportation of a device in a vacuum processing system | Henning Aust | 2022-11-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508595 | Apparatus and method for contactless transportation of a device in a vacuum processing system | Henning Aust | 2022-11-22 |