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Home › Magnetic levitation system, base of a magnetic levitation system, vacuum system, and method of contactlessly holding and moving a carrier in a vacuum chamber

Magnetic levitation system, base of a magnetic levitation system, vacuum system, and method of contactlessly holding and moving a carrier in a vacuum chamber

US Patent 11377310 · Granted Jul 5, 2022

Estimated economic value: $35,888,000 ⓘ

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