Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7575662 | Method for operating a sputter cathode with a target | Stefan Bangert, Wolfgang BUSCHBECK, Markus Hanika, Karl-Albert KEIM, Michael König +4 more | 2009-08-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7575662 | Method for operating a sputter cathode with a target | Stefan Bangert, Wolfgang BUSCHBECK, Markus Hanika, Karl-Albert KEIM, Michael König +4 more | 2009-08-18 |