Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6575622 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe | Mike Welch, Paul Luscher, Siamak Salimian, Brad L. Mays | 2003-06-10 |
| 6353210 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe | Mike Welch, Paul Luscher, Siamak Salimian, Brad L. Mays | 2002-03-05 |