Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643364 | Plasma chamber with fixed RF matching | Jun Zhao, Stefan Wolff, Kenneth Smyth, William Taylor | 1997-07-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643364 | Plasma chamber with fixed RF matching | Jun Zhao, Stefan Wolff, Kenneth Smyth, William Taylor | 1997-07-01 |