Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8105465 | Method for depositing conformal amorphous carbon film by plasma-enhanced chemical vapor deposition (PECVD) | Kwangduk Douglas Lee, Takashi Morii, Yoichi Suzuki, Sudha Rathi, Martin Jay Seamons +2 more | 2012-01-31 |