Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7064078 | Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme | Wei Liu, Jim Zhongyi He, Sang-Hoon Ahn, Meihua Shen, Hichem M'Saad +1 more | 2006-06-20 |