Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8840725 | Chamber with uniform flow and plasma distribution | David Palagashvili, Michael D. Willwerth, Jingbao Liu | 2014-09-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8840725 | Chamber with uniform flow and plasma distribution | David Palagashvili, Michael D. Willwerth, Jingbao Liu | 2014-09-23 |