Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4704199 | Method of forming an iron oxide film by reacting sputtering with control of a glow discharge by monitoring an emission spectrum of iron from the glow discharge | Toshio Yokokawa | 1987-11-03 |
| 4604180 | Target assembly capable of attaining a high step coverage ratio in a magnetron-type sputtering device | Toshiyuki Nozaki, Naokichi Hosokawa | 1986-08-05 |