Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5458759 | Magnetron sputtering cathode apparatus | Tsukasa Kobayashi | 1995-10-17 |
| 5382344 | Sputtering apparatus | Kyungshik Kim | 1995-01-17 |
| 4604180 | Target assembly capable of attaining a high step coverage ratio in a magnetron-type sputtering device | Yohichi Hirukawa, Toshiyuki Nozaki | 1986-08-05 |