Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5778039 | Method and apparatus for the detection of light elements on the surface of a semiconductor substrate using x-ray fluorescence (XRF) | John K. Lowell | 1998-07-07 |
| 5754620 | Apparatus and method for characterizing particles embedded within a thin film configured upon a semiconductor wafer | Donald A. Tiffin | 1998-05-19 |
| 5742658 | Apparatus and method for determining the elemental compositions and relative locations of particles on the surface of a semiconductor wafer | Donald A. Tiffin | 1998-04-21 |
| 5657363 | Method and apparatus for determining the thickness and elemental composition of a thin film using radioisotopic X-ray fluorescence (RXRF) | John K. Lowell | 1997-08-12 |