Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472326 | Reliable particle removal following a process chamber wet clean | Allison Holbrook, Greg A. Johnson, Darlene Smith, Omar Serna | 2002-10-29 |
| 6010916 | Method for improving semiconductor wafer processing | Stephen D. Horton | 2000-01-04 |
| 5944038 | Wafer restraining device | Stephen D. Horton | 1999-08-31 |