Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6472326 | Reliable particle removal following a process chamber wet clean | Allison Holbrook, Greg A. Johnson, Darlene Smith, Theodros W. Mariam | 2002-10-29 | $1,498,000 |