Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7915170 | Reducing contamination of semiconductor substrates during beol processing by providing a protection layer at the substrate edge | Frank Feustel, Carsten Peters | 2011-03-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7915170 | Reducing contamination of semiconductor substrates during beol processing by providing a protection layer at the substrate edge | Frank Feustel, Carsten Peters | 2011-03-29 |