Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7763532 | Technique for forming a dielectric etch stop layer above a structure including closely spaced lines | Kai Frohberg, Matthias Schaller | 2010-07-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7763532 | Technique for forming a dielectric etch stop layer above a structure including closely spaced lines | Kai Frohberg, Matthias Schaller | 2010-07-27 |