Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7763532 | Technique for forming a dielectric etch stop layer above a structure including closely spaced lines | Kai Frohberg, Matthias Schaller | 2010-07-27 | $6,860,000 |