Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6572441 | Method of and apparatus for chemical-mechanical polishing | Owen J. Hehmeyer | 2003-06-03 |
| 6572443 | Method and apparatus for detecting a process endpoint | Peter J. Beckage, Keith A. Edwards, Wonhui Cho | 2003-06-03 |
| 6179688 | Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation | Peter J. Beckage, Keith A. Edwards, Wonhui Cho | 2001-01-30 |