Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9018023 | Detection of surface defects by optical inline metrology during Cu-CMP process | — | 2015-04-28 |
| 8152595 | System and method for optical endpoint detection during CMP by using an across-substrate signal | Gerd Marxsen | 2012-04-10 |