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Kornelia Dittmar

AM AMD: 1 patents #5,683 of 9,279Top 65%
Overall (All Time): #3,270,568 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8062982 High yield plasma etch process for interlayer dielectrics Daniel Fischer, Matthias Schaller, Matthias Lehr 2011-11-22