Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6222936 | Apparatus and method for reducing defects in a semiconductor lithographic process | Khoi A. Phan, Gurjeet S. Bains, David A. Steele, Ramkumar Subramanian | 2001-04-24 |
| 6184156 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 2001-02-06 |
| 6001542 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 1999-12-14 |
| 5985497 | Method for reducing defects in a semiconductor lithographic process | Khoi A. Phan, Gurjeet S. Bains, David A. Steele, Ramkumar Subramanian | 1999-11-16 |
| 5911090 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 1999-06-08 |
| 5874202 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 1999-02-23 |
| 5750317 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 1998-05-12 |