Patents per Year
Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6222936 | Apparatus and method for reducing defects in a semiconductor lithographic process | Khoi A. Phan, Gurjeet S. Bains, David A. Steele, Ramkumar Subramanian | 2001-04-24 | $8,453,000 |
| 6184156 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 2001-02-06 | $6,888,000 |
| 6001542 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 1999-12-14 | $4,856,000 |
| 5985497 | Method for reducing defects in a semiconductor lithographic process | Khoi A. Phan, Gurjeet S. Bains, David A. Steele, Ramkumar Subramanian | 1999-11-16 | $2,707,000 |
| 5911090 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 1999-06-08 | $10,824,000 |
| 5874202 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 1999-02-23 | $4,009,000 |
| 5750317 | Process and system for flattening secondary edgebeads on resist coated wafers | — | 1998-05-12 | $5,129,000 |