Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6222936 | Apparatus and method for reducing defects in a semiconductor lithographic process | Khoi A. Phan, David A. Steele, Jonathan Alan Orth, Ramkumar Subramanian | 2001-04-24 |
| 5985497 | Method for reducing defects in a semiconductor lithographic process | Khoi A. Phan, David A. Steele, Jonathan Alan Orth, Ramkumar Subramanian | 1999-11-16 |