Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486036 | Method and apparatus for process control of alignment in dual damascene processes | John C. Miethke | 2002-11-26 |
| 6265306 | Resist flow method for defining openings for conductive interconnections in a dielectric layer | Stephen Keetai Park | 2001-07-24 |