Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6508948 | Cyanuric fluoride and related compounds for anisotropic etching | Ronald Martin Pearlstein | 2003-01-21 |
| 5413670 | Method for plasma etching or cleaning with diluted NF.sub.3 | John Giles Langan, Scott Edward Beck | 1995-05-09 |
| 5196814 | High power, high frequency, vacuum flange | Michael R. McDaniel | 1993-03-23 |