| 9684053 |
Wafer for testing and a test system |
— |
2017-06-20 |
| 8241929 |
Contactor, contact structure, probe card, and test apparatus |
Tadao Saito, Yoshihiro Abe |
2012-08-14 |
| 8097475 |
Method of production of a contact structure |
Tadao Saito, Yoshihiro Abe |
2012-01-17 |
| 7764152 |
Contactor, contact structure provided with contactors, probe card, test apparatus, method of production of contact structure, and production apparatus of contact structure |
Tadao Saito, Yoshihiro Abe |
2010-07-27 |
| 7474109 |
Contact terminal for measurement, measurement apparatus, probe card set, wafer probe apparatus, and testing apparatus |
Tadao Saito, Shigeru Matsumura, Shin Sakiyama |
2009-01-06 |