Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660063 | Sorbent-based gas storage and delivery system | Glenn M. Tom, James V. McManus, Luping Wang | 2003-12-09 |
| 6517594 | Air management system and method for chemical containment and contamination reduction in a semiconductor manufacturing facility | Bruce Walker | 2003-02-11 |
| 6471750 | Gas cabinet assembly comprising back migration scrubber unit | — | 2002-10-29 |
| 6030591 | Process for removing and recovering halocarbons from effluent process streams | Glenn M. Tom, H. Eric Fisher | 2000-02-29 |
| 6001172 | Apparatus and method for the in-situ generation of dopants | Gautam Bhandari, Michael A. Todd, Timothy E. Glassman | 1999-12-14 |
| 5972743 | Precursor compositions for ion implantation of antimony and ion implantation process utilizing same | Timothy E. Glassman, Thomas H. Baum, James V. McManus | 1999-10-26 |
| 5914091 | Point-of-use catalytic oxidation apparatus and method for treatment of voc-containing gas streams | Mark Holst, Glenn M. Tom | 1999-06-22 |
| 5851270 | Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means | — | 1998-12-22 |
| 5837027 | Manufacturing process for gas source and dispensing systems | James V. McManus | 1998-11-17 |
| 5704967 | Fluid storage and delivery system comprising high work capacity physical sorbent | Glenn M. Tom, James V. McManus | 1998-01-06 |
| 5704965 | Fluid storage and delivery system utilizing carbon sorbent medium | Glenn M. Tom, James V. McManus | 1998-01-06 |