SG

Shi Gang

AE Advanced Micro-Fabrication Equipment: 1 patents #26 of 61Top 45%
Overall (All Time): #3,063,443 of 4,157,543Top 75%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9095038 ICP source design for plasma uniformity and efficiency enhancement Songlin Xu, Tuqiang Ni 2015-07-28