Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9095038 | ICP source design for plasma uniformity and efficiency enhancement | Songlin Xu, Tuqiang Ni | 2015-07-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9095038 | ICP source design for plasma uniformity and efficiency enhancement | Songlin Xu, Tuqiang Ni | 2015-07-28 |