Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537039 | Photomask assembly with reflective photomask and method of manufacturing a reflective photomask | Thorsten Schedel, Andreas Schenke | 2022-12-27 |
| 10031409 | Reflective photomask and reflection-type mask blank | Thorsten Schedel | 2018-07-24 |
| 9405185 | Shape metrology for photomasks | Clemens Utzny, Christian Buergel, Albrecht Ullrich | 2016-08-02 |
| 5933868 | Sports glove | — | 1999-08-10 |