Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9405185 | Shape metrology for photomasks | Markus Bender, Christian Buergel, Albrecht Ullrich | 2016-08-02 |
| 8932785 | EUV mask set and methods of manufacturing EUV masks and integrated circuits | — | 2015-01-13 |