Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537908 | Method for dual-damascence patterning of low-k interconnects using spin-on distributed hardmask | Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman, Christy S. Tyberg | 2003-03-25 |