Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393127 | Exposure light beam phase measurement method in laser interference photolithography, and photolithography system | Leijie Wang, Yu Zhu, Ming Zhang, Jitao Xu, Rong Cheng +2 more | 2025-08-19 |
| 12270645 | High-resolution phase detection method and system based on plane grating laser interferometer | Yu Zhu, Rujin Han, Chang Tian, Ming Zhang, Wensheng Yin +2 more | 2025-04-08 |