Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293903 | Substrate support and plasma processing apparatus | Hajime Tamura, Shin Yamaguchi, Tsuguto Sugawara, Katsuyuki Koizumi | 2025-05-06 |
| 12288713 | Mounting table and plasma processing apparatus | Daiki Satoh, Akira Nagayama | 2025-04-29 |
| 12272528 | Stage and plasma processing apparatus | Tsuguto Sugawara, Shin Yamaguchi, Hajime Tamura | 2025-04-08 |