Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293903 | Substrate support and plasma processing apparatus | Yasuharu Sasaki, Shin Yamaguchi, Tsuguto Sugawara, Katsuyuki Koizumi | 2025-05-06 |
| 12272528 | Stage and plasma processing apparatus | Yasuharu Sasaki, Tsuguto Sugawara, Shin Yamaguchi | 2025-04-08 |
| 12198906 | Substrate support and plasma processing apparatus | — | 2025-01-14 |