Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293903 | Substrate support and plasma processing apparatus | Hajime Tamura, Yasuharu Sasaki, Shin Yamaguchi, Katsuyuki Koizumi | 2025-05-06 |
| 12272528 | Stage and plasma processing apparatus | Yasuharu Sasaki, Shin Yamaguchi, Hajime Tamura | 2025-04-08 |