Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412766 | Substrate processing apparatus and substrate processing method | Shuhei Goto, Takeshi Matsumoto | 2025-09-09 |
| 12304354 | Plan preparation system and plan preparation apparatus | Daiki YOKOYAMA, Yoshihiro Sakayanagi, Midori SUGIYAMA, Hirotaka SAITO | 2025-05-20 |
| 12290898 | Substrate processing method and substrate processing apparatus | Nobutaka Fukunaga, Takeshi Matsumoto | 2025-05-06 |
| 12194594 | Substrate processing method and substrate processing apparatus | Nobutaka Fukunaga, Takeshi Matsumoto | 2025-01-14 |
| 12191153 | Substrate processing apparatus, substrate processing system and substrate processing method | Munehisa KODAMA | 2025-01-07 |