Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377519 | Substrate processing apparatus and substrate processing method | Masakazu Yarimitsu, Katsuhisa Fujii, Hidejiro RYU | 2025-08-05 |
| 12290898 | Substrate processing method and substrate processing apparatus | Tomohiro Kaneko, Takeshi Matsumoto | 2025-05-06 |
| 12194594 | Substrate processing method and substrate processing apparatus | Takeshi Matsumoto, Tomohiro Kaneko | 2025-01-14 |