Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377519 | Substrate processing apparatus and substrate processing method | Nobutaka Fukunaga, Masakazu Yarimitsu, Hidejiro RYU | 2025-08-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377519 | Substrate processing apparatus and substrate processing method | Nobutaka Fukunaga, Masakazu Yarimitsu, Hidejiro RYU | 2025-08-05 |