Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412766 | Substrate processing apparatus and substrate processing method | Tomohiro Kaneko, Takeshi Matsumoto | 2025-09-09 |
| 12322631 | Substrate processing system, substrate processing method, and recording medium | Takafumi Tsuchiya, Hiromi Hara, Wataru Tsukinoki | 2025-06-03 |