Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322631 | Substrate processing system, substrate processing method, and recording medium | Takafumi Tsuchiya, Wataru Tsukinoki, Shuhei Goto | 2025-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322631 | Substrate processing system, substrate processing method, and recording medium | Takafumi Tsuchiya, Wataru Tsukinoki, Shuhei Goto | 2025-06-03 |