Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12391472 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Naruaki Iida, Kousei Ide | 2025-08-19 |
| 12312184 | Substrate transfer device and substrate transfer method | Tatsuhiko Tsujihashi, Kazuki Matsushita | 2025-05-27 |
| 12255063 | Substrate processing system and substrate processing method | Hayato TANOUE, Takashi Uno, Satoshi Ookawa | 2025-03-18 |
| 12255081 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Hiroaki Inadomi, Shota Umezaki, Kouji Kimoto | 2025-03-18 |
| 12198961 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Taro Yamamoto | 2025-01-14 |