SO

Satoshi Ookawa

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #227,772 of 469,880Top 50%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12255063 Substrate processing system and substrate processing method Hayato TANOUE, Takashi Uno, Suguru Enokida 2025-03-18