Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322606 | Substrate processing apparatus and substrate processing method | Hiroaki Inadomi | 2025-06-03 |
| 12283495 | Substrate processing apparatus and substrate processing method | Mikio Nakashima, Hiroaki Inadomi | 2025-04-22 |
| 12255081 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Hiroaki Inadomi, Suguru Enokida, Kouji Kimoto | 2025-03-18 |