ST

Shigeru Tahara

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
UD Universite D'Orleans: 1 patents #1 of 9Top 15%
📍 Rifu, JP: #85 of 257 inventorsTop 35%
Overall (2025): #215,552 of 469,880Top 50%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12249515 Etching method and etching apparatus Jacques Faguet, Kaoru Maekawa, Kumiko Ono, Nagisa Sato, Remi Dussart +3 more 2025-03-11