Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12290835 | Methods for stabilization of self-assembled monolayers (SAMs) using sequentially pulsed initiated chemical vapor deposition (spiCVD) | Omid Zandi, Ornella Sathoud | 2025-05-06 |
| 12249515 | Etching method and etching apparatus | Shigeru Tahara, Kaoru Maekawa, Kumiko Ono, Nagisa Sato, Remi Dussart +3 more | 2025-03-11 |
| 12243752 | Systems for etching a substrate using a hybrid wet atomic layer etching process | Paul Abel | 2025-03-04 |