Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249515 | Etching method and etching apparatus | Shigeru Tahara, Jacques Faguet, Kaoru Maekawa, Kumiko Ono, Nagisa Sato +3 more | 2025-03-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249515 | Etching method and etching apparatus | Shigeru Tahara, Jacques Faguet, Kaoru Maekawa, Kumiko Ono, Nagisa Sato +3 more | 2025-03-11 |