Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283489 | Etching method and etching apparatus | Naoki Shindo, Mitsuhiro Tachibana, Haruna Suzuki, Gen You | 2025-04-22 |
| 12215417 | Substrate processing method and substrate processing device | Tetsuro Takahashi | 2025-02-04 |